The origin of the residual dirt particles can be determined precisely by means of material typing. Thus, you are able to purge the sources of contamination from the production process.
Automated SEM-EDS Analysis
Benefits
Automated SEM-EDS allows the combined analysis of geometrical properties and material composition of residual dirt particles on a membrane. The method is most accurate for feature sizing down to the smallest particles < 1 µm.
Technique
Size and shape are determined by the scanning electron microscope (SEM) which is the imaging unit. At the same time, the chemical composition is assessed by the use of energy dispersive x-ray spectroscopy (EDS). Typing means that the particles are assigned individually to a material class according to their composition.
Download an example analysis in PDF (80 kB)
Further Links
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